A-BCD: An economic 100 V RESURF silicon-on-insulator BCD technology for consumer and automotive applications

Abstract

A-BCD is a family of 100 V BCD processes on SOI offering latchup free operation, improved robustness, superior EMC performance, higher packing density, lower mask count, high temperature and higher frequency operation and easier design over bulk silicon technology. A wide range of a passive and active (5/12/25/60 and 100 V) devices are available. Device design tradeoffs for n- and p-type LDMOS and extended drain PMOS are discussed in detail. This and the low mask count makes it a versatile process for cost-sensitive consumer and automotive markets.