Very short TAT ULSI trial manufacturing line construction

Abstract

The LSI manufacturing division manufactures leading-edge trial products to support the semiconductor business of NEC. As LSI design rules are rapidly becoming finer, short turn-around time (TAT) is becoming an important subject in order to create new products as quickly as possible. Under these circumstances, we established a system of improvement based on total productive maintenance (TPM) to achieve 100% customer satisfaction, with priority on very short TAT and success on the first run.