Nanopatterning with Extreme Ultraviolet Interference Lithography for Nanoelectronics and Biotechnology

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352046

B. Stadler, H. Solak, S. Frerker, M. Grandin, J. Voros

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引用次数: 1

Abstract

We present a platform for the controlled patterning of nano-objects such as gold colloids in the micron and nanorange. We are separating the lithography step from the subsequent functionalization. This has many advantages among them the independence of the linkage chemistry and the lithography process and the possibility to position individual nano-objects. The lithography step is extreme UV interference lithography in the nanorange and standard photolithography in the micron range. As a proof of concept, micro and nanopatterns of single-stranded DNAs are created in an inert background of PLL-g-PEG. The DNA patterns are converted to arrays of DNA-tagged gold colloids by directed self-assembly using the specificity of DNA hybridization. Especially nanoline arrays of gold colloids have the potential to serve as e.g. nanowires for electrical label-free biosensing. In addition, we also present the characterization of the adsorption kinetics of 20 nm DNA-tagged gold colloids via SPR.

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纳米电子学和生物技术的极紫外干涉光刻纳米图案

我们提出了一个平台，以控制图案的纳米物体，如金胶体在微米和纳米橙。我们正在将光刻步骤与随后的功能化步骤分开。这有许多优点，其中包括连接化学和光刻工艺的独立性，以及单个纳米物体定位的可能性。光刻步骤为纳米级的极紫外干涉光刻和微米级的标准光刻。作为概念的证明，单链dna的微观和纳米模式是在PLL-g-PEG的惰性背景下创建的。利用DNA杂交的特异性，通过定向自组装将DNA模式转换为DNA标记的金胶体阵列。特别是金胶体的纳米线阵列有潜力作为无标签生物传感的纳米线。此外，我们还通过SPR表征了20 nm dna标记金胶体的吸附动力学。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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