Integrated thin film heater and sensor with planar lightwave circuits

M. Yan, J. Weaver, C. Ho, X. Hao, T. Tarter
{"title":"Integrated thin film heater and sensor with planar lightwave circuits","authors":"M. Yan, J. Weaver, C. Ho, X. Hao, T. Tarter","doi":"10.1109/STHERM.2004.1291322","DOIUrl":null,"url":null,"abstract":"This paper describes the use of integrated heaters and closed-loop applications for temperature control of planar waveguide circuits. The history of AWG temperature control is discussed along with the difficulties in applying this control. Modeling and measurement results for external and integrated heaters will be presented. Fundamental considerations as well as modeling and measurement of the thermal characteristics of various physical constructions are discussed, and the rationale for applying these disciplines to a given problem is highlighted. In this work, we will present the evolution of these unique integrated thin film heaters and review thermal-optical modeling to experimental demonstration of arrayed waveguide gratings (AWG). The goal of the work is to provide a solution path for integration of multiple optical devices on a single substrate from a thereto-mechanical as well as optical discipline point of view.","PeriodicalId":409730,"journal":{"name":"Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545)","volume":"434 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STHERM.2004.1291322","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

This paper describes the use of integrated heaters and closed-loop applications for temperature control of planar waveguide circuits. The history of AWG temperature control is discussed along with the difficulties in applying this control. Modeling and measurement results for external and integrated heaters will be presented. Fundamental considerations as well as modeling and measurement of the thermal characteristics of various physical constructions are discussed, and the rationale for applying these disciplines to a given problem is highlighted. In this work, we will present the evolution of these unique integrated thin film heaters and review thermal-optical modeling to experimental demonstration of arrayed waveguide gratings (AWG). The goal of the work is to provide a solution path for integration of multiple optical devices on a single substrate from a thereto-mechanical as well as optical discipline point of view.
集成薄膜加热器和传感器与平面光波电路
本文介绍了使用集成加热器和闭环应用来控制平面波导电路的温度。讨论了AWG温度控制的历史,以及应用这种控制的困难。将介绍外置加热器和集成加热器的建模和测量结果。讨论了各种物理结构的热特性的基本考虑以及建模和测量,并强调了将这些学科应用于给定问题的基本原理。在这项工作中,我们将介绍这些独特的集成薄膜加热器的发展,并回顾阵列波导光栅(AWG)的热光学建模实验演示。这项工作的目标是从机械和光学学科的角度出发,为在单一基板上集成多个光学器件提供解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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