Impact from IMC thickness on the reliability of wire bonding

J. Xiao, J. Huang, J. Liao, Y. Lin
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引用次数: 3

Abstract

Materials to replace gold wires in wire bonding devices have been pursued for years in industries for cost reduction. The most important factors, besides the price and electric and thermal performance of the material itself, is the growth rate of the intermetallic compound (IMC) at the interface, which would severely affect the reliability of the devices. In this paper, we studied and analyzed the IMC growth for Au, Cu and Ag wires with Al pads. High temperature storage (HTS) aging experiments were employed for accelerated test. Scanning Electron Microscopy (SEM) and Energy Dispersive X-ray Spectrometer (EDS) were adopted to investigate the IMC at the interface of the wires and the pads. IMC growth including Kirkendall holes and cracks were examined and compared. It is found that in the samples with gold wires, Kirkendall holes and cracks formed at the interface, which led to a high increase of electrical resistance and possible ball lift. When using copper wires instead of Au wires, although the IMC growth rate reduced, the limitation of Cu wires is due to the high hardness and yield strength at a high temperature. On the other hand, the surface of copper is easy to produce a thick oxide layer, sometimes leading to earlier failures than using Au wires. Compared with copper wires, silver wires are softer. And it is found that IMC growth rate of samples with silver wires is lower than those with gold wires. Correlations between the IMC and the reliability will be discussed.
IMC厚度对焊线可靠性的影响
为了降低成本,工业界多年来一直在寻找替代金属线的材料。除了价格和材料本身的电学和热学性能外,最重要的因素是界面处金属间化合物(IMC)的生长速度,这将严重影响器件的可靠性。本文研究并分析了Al衬垫的Au、Cu和Ag线的IMC生长。采用高温贮藏(HTS)老化实验进行加速试验。采用扫描电子显微镜(SEM)和能量色散x射线光谱仪(EDS)研究了金属丝与焊盘界面处的IMC。对包括Kirkendall孔和裂纹在内的IMC生长进行了研究和比较。结果表明,在有金线的试样中,在界面处形成了Kirkendall孔和裂纹,导致电阻的大幅度增加和可能的球升。当用铜丝代替金丝时,虽然铜丝的IMC生长率降低,但铜丝的局限性是由于其在高温下的高硬度和屈服强度。另一方面,铜的表面容易产生一层厚厚的氧化层,有时会导致比使用金线更早的故障。与铜线相比,银线更柔软。结果表明,镀银线样品的IMC生长率低于镀金线样品。本文将讨论IMC与可靠性之间的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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