Manufacturing and reliability of flexible integrated module boards

T. Waris, R. Saha, J. Kivilahti
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引用次数: 6

Abstract

In this communication a fabrication process for flexible integrated module boards (IMB) is presented The IMB-technique being developed enables very high density integration of active and passive components into organic substrates. Thinned active components, 50 /spl mu/m in thickness, were embedded into flexible substrate using elastic molding polymer. Electrical interconnections were fabricated with the solderless fully additive build-up process, where the photoimagible polymer was used as a dielectric layer and high density wirings and interconnections were produced using electroless copper deposition. Since the module consists of flexible elements the resulting structure gives increased operational reliability. In addition to extensive electrical testing the results of finite-element modelling of the IMB interconnections were compared with those of the corresponding flip chip interconnections. Flexible modules and their interconnection structures were also characterized in detail by using the optical and scanning electron microscopy.
柔性集成模块板的制造与可靠性
本文介绍了一种柔性集成模块板(IMB)的制造工艺,该技术能够将有源和无源元件高密度集成到有机基板中。将厚度为50 /spl mu/m的活性成分减薄,用弹性模塑聚合物嵌入柔性基板中。电气互连采用无焊完全添加剂堆积工艺,其中光可成像聚合物用作介电层,高密度布线和互连使用化学镀铜生产。由于该模块由灵活的元件组成,因此结构提高了操作可靠性。除了广泛的电气测试外,还将IMB互连的有限元建模结果与相应的倒装芯片互连的结果进行了比较。利用光学显微镜和扫描电镜对柔性模块及其互连结构进行了详细表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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