Cross-Contamination Control at MIT's Microsystems Technology Labs

Abstract

The mission of the Microsystems Technology Labs (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. MTL's research program is interdisciplinary, including students and faculty from most of the academic departments and research centers in MIT's Schools of Engineering and Science. In addition, MTL welcomes scientists and engineers from its sponsoring companies and, through its fabrication Facilities Access Program (FFA) includes engineers from companies who wish to make use of the MTL fabs for prototype development. Through its Outreach Program, MTL welcomes researchers from other universities and government labs.