Electroless over pad metallization for high temperature interconnections

S. Qu, K. Pham, L. Nguyen, A. Prabhu, A. Poddar, S. Athavale, A. Xu, Y. C. How, C. Lee, K. C. Ooi
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引用次数: 5

Abstract

Electrolessly plated over pad metallization (OPM) was evaluated for high temperature gold wire bonding applications. Bonding strength, measured by wire bond bump shear test, of 4N gold wire on electroless OPMs, such as electroless nickel/immersion gold (ENIG), electroless nickel/electroless palladium (ENEP), and electroless nickel/electroless palladium/immersion gold (ENEPIG), was carefully evaluated before and after wire bond was subjected to various environmental stresses. Failure modes, besides bonding strength, were particularly examined for overall bonding quality assessment and OPM screening. Authors' intensive work found that ENEPIG OPM had the highest bonding strength and consistent failure mode over the other two OPM options: ENIG and ENEP. Even after 3000 hours of 175 °C high temperature storage life test, there is no sign of bonding strength degradation.
用于高温互连的化学镀金属
评价了在焊盘金属化(OPM)上化学镀的高温金丝键合应用。在各种环境应力作用前后,对4N金丝在化学opm(如化学镍/浸金(ENIG)、化学镍/化学钯(ENEP)、化学镍/化学钯/浸金(ENEPIG))上的结合强度进行了仔细评估。除了结合强度外,还特别检查了破坏模式,以进行整体结合质量评估和OPM筛选。通过深入研究发现,与ENIG和ENEP两种OPM方案相比,ENEPIG OPM具有最高的结合强度和一致的破坏模式。即使经过175℃高温储存寿命测试3000小时,也没有粘结强度下降的迹象。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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