Enabling Cu wire in 3D stack package

Ruby Ann M. Camenforte, Ray Fredric de Asis, M. Chowdhury
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Abstract

Over the past two decades, the semiconductor industry has seen a rapid increase in trend for miniaturization of electronic devices. The demand for small and compact size devices has been in every application, be it smartphones, tablets, automotive, industrial, or healthcare equipment. Since 2011, Texas Instruments (TI) has shipped more than 30 million units of its PowerStack packaging technology, a combination of chip stacking and clip bonding that is designed to improve performance and chip densities in power management devices. In PowerStack, TI's NexFET power MOSFETs are stacked on a grounded lead frame. The packaging technology enables heightened integration in a quad flat-pack no-lead (QFN) form factor, cutting down on package area by as much as 50% (compared to side-by-side MOSFETs). However, integration poses multiple packaging manufacturability and reliability challenges, more so for wire bonded devices where complex die to die bonds must be implemented, thus limiting most packaging assembly suppliers to stay with gold (Au) wire. This paper discusses the technical concerns of Cu wire bonding on a three die MCM QFN and the innovative approach to overcome the bonding challenges.
在3D堆叠封装中启用铜线
在过去的二十年里,半导体行业的电子设备小型化趋势迅速增长。无论是智能手机、平板电脑、汽车、工业还是医疗保健设备,每个应用都需要小巧紧凑的设备。自2011年以来,德州仪器(TI)的PowerStack封装技术出货量已超过3000万台。PowerStack封装技术结合了芯片堆叠和夹接技术,旨在提高电源管理设备的性能和芯片密度。在PowerStack中,TI的NexFET功率mosfet堆叠在接地引线框架上。该封装技术可提高四平面封装无引线(QFN)外形的集成度,可将封装面积减少多达50%(与并排mosfet相比)。然而,集成带来了多种封装可制造性和可靠性方面的挑战,对于必须实现复杂的模具到模具粘合的线粘合设备来说更是如此,因此限制了大多数封装组装供应商继续使用金(Au)线。本文讨论了三模MCM QFN上铜线键合的技术问题以及克服键合挑战的创新方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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