AFFCCA: a tool for critical area analysis with circular defects and lithography deformed layout

Abstract

This paper describes the AFFCCA (Accurate, Fast, Flexible Computation of Critical Area) tool. The algorithms implemented in AFFCCA can handle arbitrary geometry, defects causing shorts of arbitrary shapes, and a spectrum of process induced layout deformations. The presented results indicate that the unique features of AFFCCA allow for significant improvements in the accuracy of critical area computations.