BARAS: Novel and highly efficient simulation system for process control sweeping and statistical variation

T. Tatsumi, K. Ansai, K. Hayakawa, M. Mukai
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引用次数: 5

Abstract

For the realization of today's miniaturization and low voltage drive of ULSIs, it has become much more important to understand and predict the effect of process variations on device performance. Predicting the quantitative effect of every process variation on device characteristics has the following advantages: in designing, required performance range can be appropriately specified, and in manufacturing, when some device characteristic is out of specification, processes to control can be feed-forwarded for proper production. In order to realize this by utilizing simulations, it would be crucial for the simulation system to have a user interface with ease of operation and an efficient data processing ability based on the actual process parameter distribution of the manufacturing equipment. There are some simulation tools which enable the above tasks. However, they have difficulty in handling mask shape variations and in utilizing actual process distributions which do not follow the Gaussian distribution. We have developed BABAS, the automatic simulation system capable of very efficient process control sweeping, statistical variation analysis and output data processing, which has functions for producing input data files automatically and has an easy-to-use GUI. Furthermore, BABAS has succeeded in reducing CPU time drastically by utilizing moment expansion method and enabled Monte Carlo simulations based on real process parameter variations.
BARAS:用于过程控制、扫描和统计变化的新型高效仿真系统
为了实现ulsi的小型化和低电压驱动,了解和预测工艺变化对器件性能的影响变得更加重要。预测每个工艺变化对器件特性的定量影响有以下好处:在设计时,可以适当地规定所需的性能范围;在制造中,当某些器件特性超出规格时,可以将需要控制的工艺前馈以进行适当的生产。为了利用仿真实现这一目标,仿真系统必须具有易于操作的用户界面和基于制造设备实际工艺参数分布的高效数据处理能力。有一些仿真工具可以实现上述任务。然而,它们在处理掩模形状变化和利用不遵循高斯分布的实际过程分布方面存在困难。我们开发了BABAS自动仿真系统,该系统具有非常高效的过程控制扫描、统计变异分析和输出数据处理功能,具有自动生成输入数据文件的功能,并具有易于使用的GUI。此外,BABAS还成功地利用矩展开方法大幅减少了CPU时间,并实现了基于实际过程参数变化的蒙特卡罗模拟。
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