An optimized integration scheme for 0.13 /spl mu/m technology node dual-damascene Cu interconnect

Shyue-Shyh Lin, Chih-Wei Chen, Shien-Ming Huang, T. Kang, C. Yeh, Tsyr-Lih Li, B. Tsui, C. Hsia
{"title":"An optimized integration scheme for 0.13 /spl mu/m technology node dual-damascene Cu interconnect","authors":"Shyue-Shyh Lin, Chih-Wei Chen, Shien-Ming Huang, T. Kang, C. Yeh, Tsyr-Lih Li, B. Tsui, C. Hsia","doi":"10.1109/IITC.2000.854346","DOIUrl":null,"url":null,"abstract":"From electrical simulations, the best performance dual damascene Cu/FSG integration scheme has been defined to be via first without etching stop layer and with thinnest possible sealing nitride layer. To realize this process, 0.16 /spl mu/m and 0.27 /spl mu/m (local and global interconnect) borderless via chains (100 K) with minimum 0.36 /spl mu/m pitched metal lines (10 cm) were used as test vehicles. Sacrificial layer filled process was then defined with its process window carefully studied. From good electrical results with clearly defined process window, it is concluded that the proposed integration scheme is suitable for sub-0.13 /spl mu/m technology node applications.","PeriodicalId":287825,"journal":{"name":"Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2000.854346","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

From electrical simulations, the best performance dual damascene Cu/FSG integration scheme has been defined to be via first without etching stop layer and with thinnest possible sealing nitride layer. To realize this process, 0.16 /spl mu/m and 0.27 /spl mu/m (local and global interconnect) borderless via chains (100 K) with minimum 0.36 /spl mu/m pitched metal lines (10 cm) were used as test vehicles. Sacrificial layer filled process was then defined with its process window carefully studied. From good electrical results with clearly defined process window, it is concluded that the proposed integration scheme is suitable for sub-0.13 /spl mu/m technology node applications.
0.13 /spl mu/m技术节点双大马士革铜互连的优化集成方案
通过电学模拟,确定了最佳性能的双damascene Cu/FSG集成方案是首先通过无蚀刻停止层和尽可能薄的密封氮化物层。为了实现这一过程,使用0.16 /spl mu/m和0.27 /spl mu/m(本地和全球互连)无边界通孔链(100 K),最小0.36 /spl mu/m倾斜金属线(10 cm)作为测试车辆。定义了牺牲层填充工艺,并对其工艺窗口进行了详细研究。从良好的电气效果和明确的工艺窗口来看,所提出的集成方案适用于0.13 /spl mu/m以下的技术节点应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信