Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407)

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Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407) - 最新文献

The effects of substrate resistivity on RF component and circuit performance

Pub Date : 2000-06-07 DOI: 10.1109/IITC.2000.854313 B. Floyd, C. Hung, K. O

New interconnect structure design methodology by Layout-design-based Interconnect Structure Optimization System (LADINOS)

Pub Date : 2000-06-07 DOI: 10.1109/IITC.2000.854266 S. Kobayashi, M. Edahiro, Y. Hayashi

Comparison between HDP CVD and PECVD silicon nitride for advanced interconnect applications

Pub Date : 2000-06-07 DOI: 10.1109/IITC.2000.854287 J. Yota, M. Janani, L. Camilletti, A. Kar-Roy, Q.Z. Liu, C. Nguyen, M. D. Woo, J. Hander, P. van Cleemput, W. Chang, W. Chiou, L.J. Li, L. Chao, S. Jang, C. Yu, M. Liang

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