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Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure

Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials Pub Date : 2021-09-08 DOI:10.7567/ssdm.2021.a-4-04
W. Chang, H. Wan, Yi-Ting Cheng, Y. Lin, Toshifumi Irisawa, H. Ishii, J. Kwo, Minghwei Hong, T. Maeda
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绝缘体上锗(111)结构的低热预算外延升力
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials
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