Electromigration characterization of lead-free flip-chip bumps for 45nm technology node

C. Hau-Riege, Y. Yau, N. Yu
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引用次数: 4

Abstract

We have conducted electromigration experiments on lead-free SnAg flip-chip bump interconnection for 45nm technology node. We report lifetime distributions, kinetic parameters and intermetallic compound formation. Further, we discuss the impact of Ag-concentration as well as current direction on the electromigration reliability of these flip-chip bumps. Based on these analyses, we conclude that lead-free bumps lead to significantly more robust electromigration reliability than their SnPb counterparts, which render lead-free bumps a suitable replacement for the present and future technology nodes in terms of their current-carrying capability.
45nm技术节点无铅倒装凸点的电迁移特性
我们进行了无铅SnAg倒装芯片碰撞互连45nm技术节点的电迁移实验。我们报告了寿命分布、动力学参数和金属间化合物的形成。此外,我们还讨论了银浓度和电流方向对这些倒装凸点的电迁移可靠性的影响。基于这些分析,我们得出结论,与SnPb相比,无铅凸点具有更强的电迁移可靠性,这使得无铅凸点在载流能力方面成为当前和未来技术节点的合适替代品。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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