Time-of-Flight Secondary Ion Mass Spectrometry profiling for arsenic in silicon dioxide matrix

Abstract

This paper showed that ⁷⁵As was a better analyte species than ²⁸Si⁷⁵As in silicon dioxide for accurate quantitative profiling by Time-Of-Flight Secondary Ion Mass Spectrometry. Contrary to silicon matrix, the ion yield of ⁷⁵As showed 1 order higher than ²⁸Si ⁷⁵As in silicon dioxide matrix. The average RSF for ⁷⁵As in silicon dioxide was determined to be 5.62E20 and lower variation of ⁷⁵As RSF was observed.