Analytic Extension of the Cell-Based Oxide Breakdown Model to Full Percolation and its Implications

Abstract

We extend the cell-based approach of Sune to full percolation that is predictive down to 0.4nm. We resolve conflicting reports in the literature on the scaling behavior of the Weibull shape parameter with oxide thickness, and show that Weibull statistics can be violated if pre-existing traps are present.