Characterization of Au-Sn eutectic die attach process for optoelectronics device

Thang Tak-Seng, Decai Sun, H. Koay, Mohd-Fezley Sabudin, J. Thompson, P. Martín, P. Rajkomar, S. Haque
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引用次数: 13

Abstract

Eutectic Au-20wt%Sn die attach process has been widely used for laser diode and LED applications due to the superior strength and thermal property of the constructed solder joint. For eutectic die attach of AuSn pre-deposited die to substrate, temperature of substrate is heated above liquidus temperature of eutectic Au-Sn and followed by lower temperature post-bond for solidification. Depending on the setup and configuration of the eutectic bonder, the time for the die to remain on bonding stage varies before being transferred to cooler post bond zone. In this study, the interaction of Au and Sn layers at different temperature above liquidus of 280/spl deg/C are analyzed. The formation of Au-Sn eutectic 80:20 and other intermetallic and phase compositions with response to different temperature and time are characterized. 20 minutes of prolonged exposure time is set as the utmost condition to characterize the property of the bonding interface and intermetallic compositions. The result from the analysis demonstrates that Au has migrated to eutectic Au-20wt%Sn to form Au rich solder interface with about Au-4.384.58wt%Sn at 300/spl deg/C and Au-3.45-4.12wt%Sn at 320/spl deg/C respectively after 20 minutes of exposure time. Placement accuracy of the dies is found to be unaffected after the heat exposure.
光电器件中Au-Sn共晶贴片工艺的表征
由于共晶Au-20wt%Sn焊点具有优异的强度和热性能,因此已广泛应用于激光二极管和LED应用。AuSn预沉积模具的共晶模具附着在基体上时,先将基体温度加热到Au-Sn共晶的液相温度以上,再进行较低温度的后结合凝固。根据共晶键合机的设置和配置,在转移到较冷的键合后区域之前,模具保持在键合阶段的时间有所不同。本文分析了在280℃/spl℃以上不同温度下Au层和Sn层的相互作用。研究了不同温度和时间下金-锡共晶80:20的形成及其他金属间和相组成。将20分钟的延长曝光时间设置为表征键合界面和金属间成分性质的最大条件。结果表明,暴露20分钟后,Au向共晶Au-20wt%Sn迁移,形成富Au焊点界面,在300/spl℃温度下,Au-4.384.58wt%Sn左右,在320/spl℃温度下,Au-3.45-4.12wt%Sn左右。发现热暴露后模具的放置精度不受影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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