{"title":"Real time FITR spectroscopic and kinetic studies of Cu surface reduction by using formic acid vapor","authors":"C. Kuo, Jenn-Ming Song","doi":"10.1109/LTB-3D.2014.6886180","DOIUrl":null,"url":null,"abstract":"In this study, an real time FTIR system was adopted to monitor the reactions between formic acid vapors and the oxidized copper surface at difference temperatures. A cuprous oxide (Cu2O) surface layer with the thickness of 130nm can be perfectly reduced to metallic Cu by low concentration formic acid vapor at a temperature down to 200°C, and the reduction rate increases with a higher reaction temperature. It is suggested that there exists a critical temperature at about 250°C, above which H2 may dissociate into H+, and combines with OH- boned on the sample surface to form large amounts of H2O. A much higher activation energy may support this point.","PeriodicalId":123514,"journal":{"name":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LTB-3D.2014.6886180","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this study, an real time FTIR system was adopted to monitor the reactions between formic acid vapors and the oxidized copper surface at difference temperatures. A cuprous oxide (Cu2O) surface layer with the thickness of 130nm can be perfectly reduced to metallic Cu by low concentration formic acid vapor at a temperature down to 200°C, and the reduction rate increases with a higher reaction temperature. It is suggested that there exists a critical temperature at about 250°C, above which H2 may dissociate into H+, and combines with OH- boned on the sample surface to form large amounts of H2O. A much higher activation energy may support this point.