Development of SiC power module using 70μm single metal layer substrates

Abstract

While leadframe has come a long way as a cost effective substrate, there is still limitation over its design rule. In this article, the authors have developed and put to test a SiC based PQFN using 70μm single metal layer substrates, allowing further miniaturization and complex design of PQFN. New high temperature EMC with a Tg of 241°C and lead free bismuth silver solder are adopted. Reliability tests and RDS,on results showed that the materials adopted in the development does not degrade the MOSFET's functionality and all samples passed reliability and power cycling tests.