Oxide-field dependence of the NMOS hot-carrier degradation rate and its impact on AC-lifetime prediction

S.A. Kim, B. Menberu, T.E. Kopley, J. E. Chung
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引用次数: 14

Abstract

This study presents a general relationship between the NMOS hot-carrier degradation rate n and the oxide-electric field at the drain E/sub ox/, which is valid over a wide range of stress-bias conditions and device parameters. Physical mechanisms for this oxide-field dependence are explored. It is also shown that failure to account for the oxide-field dependence of n and the inherent non-linearity of the degradation time dependence can result in significant overestimation of the predicted AC lifetime.
NMOS热载子降解率的氧化场依赖性及其对交流寿命预测的影响
本研究提出了NMOS热载子降解率n与漏极E/sub ox/处的氧化物电场之间的一般关系,该关系在很大范围的应力偏置条件和器件参数下都是有效的。探讨了这种氧化场依赖性的物理机制。研究还表明,未能考虑到n的氧化场依赖性和降解时间依赖性的固有非线性,可能导致对预测的交流寿命的显着高估。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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