Dynamic Optical Techniques for IC Debug and Failure Analysis

Abstract

Optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. At the early stage of an analysis, choosing the right technique is an increasingly complex task. In some cases, one technique may bring value but no the others. Using an 180nm test structure device we present results showing the complementary of emission microscopy (EMMI), time-resolved emission (TRE) and dynamic laser stimulation (DLS) in order to help failure analyists or debug engineers to choose the right approach