The Use of Acoustic Emission in a Test for Beam-Lead, TAB, and Hybrid Chip Capacitor Bond Integrity

G. Harman
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引用次数: 4

Abstract

The use of acoustic emission (AE) in a test for beam-lead bond and anchor integrity has been investigated. AE refers to the emission of broad-band stress waves when materials are broken, cracked, or deformed. A major problem in the present work was to develop means of nondestructively stressing the delicate, irregularly extending beam leads. The most promising of the methods developed are a silicone rubber (SR) pull test, a push down test on SR-encapsulated devices, and various probe methods of applying force to the beams without contacting the chip. AE bursts from weak bonds or beam anchors axe detected with a substrate detector operating at 375 kHz or a probe detector operating at 1.1 MHz or both. The study has revealed considerable difference in the mechanical integrity of beam-lead bond-anchor systems. General deterioration of the beam-anchor system begins at pull forces per beam of approximately 1.0-2.5 gramsforce (gf), depending on the manufacturer's procedure. The forces applied to the beam-anchor system for all methods of stressing, except the pull test, are dependent upon the shape of the individual beams as they extend from the chip, as well as the uniformity of the bugging height. There are many other potential uses of AE in electronics, such as to insure the bonding integrity of flip chips, capacitor chips in hybrids, and bonds on tape automated bonded integrated circuits. The latter two uses were experimentally demonstrated in the present work. Thus it appears that AE will have an increasing role in assuring reliability in the microelectronics field.
声发射在波束引线、TAB和混合芯片电容键合完整性测试中的应用
研究了声发射(AE)在梁-铅键和锚完整性测试中的应用。声发射是指材料破裂、开裂或变形时发射的宽带应力波。目前工作中的一个主要问题是开发对微妙的、不规则延伸的梁引线进行无损应力的方法。目前开发的最有前途的方法是硅橡胶(SR)拉力测试,SR封装设备的下推测试,以及在不接触芯片的情况下对梁施加力的各种探针方法。来自弱键或束锚的声发射爆发可以用工作频率为375 kHz的衬底探测器或工作频率为1.1 MHz的探针探测器来检测。研究揭示了梁-铅-锚系统在力学完整性上的巨大差异。梁锚系统的一般劣化始于每根梁的拉力约为1.0-2.5克力(gf),具体取决于制造商的程序。除拉力试验外,施加于梁锚系统的所有应力方法的力取决于从切屑延伸的单个梁的形状,以及挠曲高度的均匀性。声发射在电子学中还有许多其他潜在的用途,例如确保倒装芯片、混合动力电容器芯片的键合完整性,以及磁带自动键合集成电路的键合。后两种用途在本工作中得到了实验证明。因此,声发射在保证微电子领域的可靠性方面将发挥越来越大的作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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