Failure Analysis of I/O with ESD Protection Devices in Advanced CMOS Technologies

Abstract

Many types of ESD protection devices such as diodes, NFETs, SCRs and RC-triggered power clamps having different failure mechanisms are used in advanced CMOS technologies. Circuit schematic analysis and SEM failure analysis are utilized to clearly predict and identify the failing I/O driver/receiver devices and/or the various ESD protection devices during an ESD event.