An investigation on secondary EFO copper wire - from a nanoscale perspective view

H. Hsu, J. Chien, Chen-yi Wang, Cheng-che Liu, S. Fu, M. Bair
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Abstract

The aim of present research is to investigate the characteristic of secondary EFO (electronic flame-off) Pd-coated copper wire. The term of “secondary” is twice EFO performed by a bonding apparatus, K&S 1488 wire bonder. As a result, secondary EFO Cu wire demonstrates a longer heat affected zone (HAZ) and a softer free air ball (FAB) which results in a decrease in the squeeze of aluminum bond pad. It is also observed that the surface roughness is a major factor to reduce the aluminum pad squeezing. The interfacial coefficient of frictional force at a nanoscale surface level was measured by Atomic Force Microscopy (AFM). The coefficient of frictional force needs to measure both the normal force (corresponds to loading force-distance curve) and a lateral force (corresponds to friction force) on a sliding contact. In addition, mechanical property of FAB surface on Pd-coated copper wire was determined by nanoindenter. A well-defined contact area is measured to study the frictional force and friction stress. Thermal aging effect has been conducted to reduce the strength of Cu wire and increase the reliability. The study of roughness parameters corresponds to evaluate the friction and the interfacial strengths. Local variation in nano tribology is also measured. Nanotribology is crucial in describing manipulations of molecules behavior. The measured surface topography (3D profiles) are then applied to determinate the potential energy in molecular dynamic (MD) method to study the atomic scale frictional interactions. A series of experimental works and MD predictions are conducted to investigate the interfacial behavior along the Cu FAB and Al Pad.
二次EFO铜线的纳米级研究
本研究的目的是研究二次电子熄火镀钯铜线的特性。“二次”一词是指由K&S 1488焊丝机进行的两次EFO。因此,二次EFO铜线表现出较长的热影响区(HAZ)和较软的自由空气球(FAB),从而减少了铝键垫的挤压。表面粗糙度是减少铝垫挤压的主要因素。利用原子力显微镜(AFM)测量了纳米级表面的界面摩擦力系数。摩擦力系数需要测量滑动接触上的法向力(对应于加载力-距离曲线)和侧向力(对应于摩擦力)。此外,用纳米压头测定了镀钯铜线上FAB表面的力学性能。测量了一个定义明确的接触区域,以研究摩擦力和摩擦应力。对铜丝进行了热时效处理,降低了铜丝的强度,提高了可靠性。粗糙度参数的研究对应于摩擦强度和界面强度的评估。纳米摩擦学的局部变化也被测量。纳米摩擦学是描述分子行为操纵的关键。然后利用分子动力学(MD)方法测量表面形貌(三维轮廓)来确定势能,以研究原子尺度的摩擦相互作用。为了研究Cu FAB和Al Pad的界面行为,进行了一系列的实验工作和MD预测。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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