Optical high-resolution image-based defect inspection on compound semiconductors

Abstract

With the increase in volume and demand for smaller, faster, and more power-efficient integrated circuits, compound semiconductors have gained significant importance over silicon. In this paper, the authors intend to describe a novel implemented solution based on high-resolution images obtained with an automated optical inspection (AOI) system, combined with an artificial intelligence-based approach to identify, and classify defects for the purpose of a stable monitoring of the processing of compound semiconductors.