Built-in real-time reliability automation (BIRRA)

Abstract

The adoption of a novel method of processing information obtained from a scanning laser beam reflected from a surface or layer in an integrated circuit is proposed. The testing problem, including prior art, is addressed, and the concepts of local defects and yield are introduced. This is followed by a brief introduction to the optical apparatus, and a discussion of the system performance. The automation and the expert system are outlined, and its relationship to the optics is shown, including reflectivity and quantization effects. It is also shown how the acquired data may be used to increase both yield and reliability of ICs. Results demonstrate the relative importance of employing parallelism in the methodology. The methodology is related to the cost effectiveness of the system.<>