On the role of adhesion in plastic packaged chips under thermal cycling stress

P. Alpern, O. Selig, R. Tilgner
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引用次数: 15

Abstract

Scanning acoustic microscopy (SAM) was used to evaluate the degradation of adhesion on a blown up sample, i.e. a Si-beam coated only on the passivated side with the molding compound under consideration. Such a bending beam sample offers two advantages for evaluation by SAM over conventionally plastic mounted chips: (1) for the acoustic waves the sample is flat, which helps to eliminate or reduce the influence of chip topography, and (2) the bending stress tends to open any partial delamination, giving better defined conditions for SAM examination. From the SAM analysis of the bending beam sample a very low stress molding compound, which had caused an unexpectedly high failure rate, was found to show poor adhesion after thermal cycling in delamination near the corners of the sample. No delaminations could be observed by means of SAM at molded product test chips, however. Thus, it is concluded that poor adhesion of the molding compound which caused delaminations in the bending beam's corner regions resulted in an increased chip failure rate.<>
热循环应力作用下塑料封装芯片中的粘附作用
使用扫描声学显微镜(SAM)来评估吹胀样品上粘附的降解,即仅在钝化侧涂覆硅梁并考虑成型化合物。与传统的塑料安装芯片相比,这种弯曲梁样品为SAM评估提供了两个优势:(1)对于声波,样品是平坦的,这有助于消除或减少芯片地形的影响;(2)弯曲应力倾向于打开任何部分分层,为SAM检查提供了更好的定义条件。从弯曲梁样品的SAM分析中发现,在样品的角落附近分层热循环后,一种非常低应力的成型化合物显示出较差的附着力,这种化合物导致了意想不到的高故效率。然而,在模制产品测试芯片上,没有观察到分层现象。因此,我们得出结论,成型化合物的附着力差,导致弯曲梁的角区分层,导致芯片故障率增加
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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