Development of a micro-nozzle and ion mobility spectrometer in LTCC

Abstract

Multilayer ceramic packaging materials provide a versatile platform to fabricate a wide variety of devices from sensors to micro-nozzles. Our research is focused on developing robust sensors for underground deployment and monopropellant micro nozzles for satellite attitude adjustment applications. An LTCC monopropellant micro-nozzle is being developed and tested to provide small thrust vectors for satellite attitude adjustments. High purity hydrogen peroxide undergoes a strong exothermic decomposition reaction in the presence of a silver catalyst. A micro-nozzle and catalyst chamber has been designed to convert hydrogen peroxide liquid to functional thrust. The device uses internal fluidic channels to direct the propellant to a silver lined catalyst chamber. The catalyst decomposes the propellant into water vapor and oxygen at temperatures near 1029 K. The hot gases are then expelled through a contoured nozzle to provide thrust. Complex internal geometric features are created using a CNC milling machine. An ion mobility spectrometer (IMS) is being developed for permanent deployment below ground to continuously analyze groundwater pollutants. Each segment was constructed of multiple layers of green tape. Five Kovar inserts were embedded in the device to function as ion gates. Reduction in size, hermeticity and system integration was made possible by the novel use of LTCC packaging technology.