Overview of FeRAMs: Trends and perspectives

Abstract

In this paper, the overview of FeRAMs, the key techniques and technical trends for scaled FeRAMs, and the marketing strategy are presented. Advantages of FeRAM compared with other emerging memories, overview of 1T1C-FeRAM and chain FeRAM, trend of memory cells and FeRAM chip features, various key device and circuit techniques to achieve low voltage scaled FeRAMs such as capacitor damage suppression and cell signal enhancement are demonstrated. High-speed embedded FeRAM solution, future cell direction, and marketing strategy to take full advantage of FeRAM merits are also discussed.