GAA 3D Si-MOSFET Based Hybrid Biosensor with Integrated Amplifier

Abstract

In this paper, we have demonstrated an idea of integration of biosensing, amplifying, and noise suppression on a single chip through a hybrid configured biosensor. The proposed biosensor is based on embedded cavity gate all around (GAA) inversion mode conventional MOS device. Lookup table based Verilog-A models for p/n type devices for different biomolecules have been developed using Atlas device simulator. The biosamples have been calibrated by incorporating them as dielectric materials with specific dielectric permitivities in the nanogap cavity. Circuit level simulations have been carried in Cadence Virtuoso. The sensitivity performance of hybrid biosensor has been evaluated interms of shift in logic threshold voltage (ΔVLt/ΔK) and voltage gain (AV ). Further we have also investigated various hybrid biosensor configurations comprising of resistive load sensing stages. For APTES (K = 3.57), in CMOS configured hybrid topology AV and ΔVLt of ≈ 30 and ≈ 240mV respectively, whereas for resistive load topology are fond to be ≈ 17.5 and ≈ 200mV respectively.