J. Koza, Caroline D. Evans, R. Huang, Jamie Storie, Vandana N. Krishnamurthy, D. Guerrero
{"title":"High-temperature stable spin-on carbon materials for advanced pattern transfer applications","authors":"J. Koza, Caroline D. Evans, R. Huang, Jamie Storie, Vandana N. Krishnamurthy, D. Guerrero","doi":"10.1117/12.2628988","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":314201,"journal":{"name":"Advances in Patterning Materials and Processes XXXIX","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Patterning Materials and Processes XXXIX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2628988","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}