An investigation on AlInGaP die crack during LED die attach process

L. Annaniah, M. Devarajan
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引用次数: 1

Abstract

Die crack is a potentially serious issue affecting reliability and performance in Semiconductor industry. As a result, customers, particularly in the automotive industry, are concerned about the consequences of this failure mode and expect zero defect. In view of this an investigation was carried out with a focus to eliminate die crack occurrence in the AlInGaP die used in certain LED packages. Crack are only observed in AlInGaP die, other die such InGaN material system were found not exhibit cracks under similar conditions of design and process. Using a process mapping approach, it was observed that cracks only occur on one particular die attach (DA) equipment model. The lower elastic modulus of GaAs combined with the crystal orientation creates condition where external forces during LED assembly, in particularly in DA process, can exceed the mechanical strength of the die causing cracking. It is known that in situation where a crack does not extend into the epitaxial layer, the die will perform well. This makes it impossible to detect at electrical testing. In a controlled experiment, dice were intentionally subjected to large stresses at DA to induce partial cracks. These LEDs were biased with high current and reverse voltage in cyclic mode to induce further stress and initiate crack propagation. It was found that with further crack propagation, these crack dice we able to be segregated. Combined with correct bond force, which will not mechanically overstress the die during assembly and stress test, shown to eliminate this failure mode in mass production and prevent failure in customer application.
LED贴装过程中AlInGaP模具裂纹的研究
在半导体工业中,模具裂纹是影响可靠性和性能的潜在严重问题。因此,客户,特别是汽车行业的客户,担心这种故障模式的后果,并期望零缺陷。鉴于此,进行了一项调查,重点是消除某些LED封装中使用的AlInGaP模具中出现的模具裂纹。仅在AlInGaP模具中观察到裂纹,在类似的设计和工艺条件下,其他模具如InGaN材料体系未发现裂纹。使用过程映射方法,观察到裂纹只发生在一个特定的模具附加(DA)设备模型上。砷化镓的低弹性模量与晶体取向相结合,导致LED组装过程中的外力,特别是在DA过程中,可能超过模具的机械强度,导致开裂。众所周知,在裂纹不延伸到外延层的情况下,模具将表现良好。这使得它不可能在电气测试中检测到。在一个对照实验中,骰子被故意地施加大应力在DA诱发部分裂纹。这些led在循环模式下偏置高电流和反向电压,以诱导进一步的应力并启动裂纹扩展。研究发现,随着裂纹的进一步扩展,这些裂纹块可以被分离。结合正确的粘结力,在装配和应力测试过程中不会对模具造成机械上的过度应力,可以消除大规模生产中的这种失效模式,并防止客户应用中的故障。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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