Electrical OverStress/ElectroStatic Discharges (EOS/ESD) Specificities in MEMS: Outline of a Protection Strategy

Abstract

In this paper, increased EOS/ESD concerns related to MEMS structural specificities are indexed and general works about failures and reliability improvement in MEMS are reviewed from an EOS/ESD point of view, as well as existing protection methods. Then a new method is proposed and recommandations for a general scheme for MEMS protection are suggested.