The worst stress condition of hot carrier degradation on high voltage LDMOSFET

Sarah Zhou Huayang, Y. Song, Z. Song, Lisa Yu Yanju, Atman Zhao Yong, Jeff Wu, V. Chang, K. Chien
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Abstract

This paper reports the research of applying the worst stress condition of thick gate oxide LDMOSFET hot carrier reliability. Based on electrical characteristic and hot carrier degradation investigation, the worst stress condition selection and failure mechanism are discussed and then the reasonable stress condition is proposed in this paper.
高压LDMOSFET热载流子退化的最坏应力条件
本文报道了应用最坏应力条件下厚栅氧化LDMOSFET热载子可靠性的研究。在电学特性和热载流子降解研究的基础上,讨论了最坏应力条件的选择和失效机理,提出了合理的应力条件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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