Bulk micromachined pressure sensor

Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) Pub Date : 2003-09-04 DOI:10.1109/UGIM.2003.1225752

L. Fuller, S. Sudirgo

引用次数: 22

Abstract

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

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散装微机械压力传感器

微机械压阻式压力传感器的设计、制造、封装和测试均在RIT实验室进行。制造的每一个方面都进行了深入的研究，并作为更好地理解MEMs器件制造的教育工具。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)

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