High Power Pulse Reliability of GaAs Power FETs

W. Anderson, F. Buot, A. Christou, Y. Anand
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引用次数: 15

Abstract

A study was made of degradation and burnout of GaAs power FETs resulting from high power RF pulses on the gate while operating at X-band. Burnout power per unit gate width (W/mm) was found to be an important parameter. The failure mechanisms were found to be subsurface burnout and high-field induced metal bridging from the gate to the source or drain. Numerical simulations show high current density transients at the gate and hot electron thermal transients at the source and drain. Hot electrons are created near the edges of the gate and at the source and drain regions by a high power pulse. It is suggested that these lead to degradation by recoil-enhanced interdiffusion at the gate and thermally-induced metal-GaAs interdiffusion, mainly at the source and drain. If such degradation progresses to the point where filamentary metal-GaAs interdiffusions reach the substrate/active channel interface, subsurface burnout is initiated by thermal runaway.
GaAs功率场效应管的高功率脉冲可靠性
研究了在x波段工作时,栅极上高功率射频脉冲对GaAs功率场效应管的退化和烧坏。发现单位栅极宽度烧坏功率(W/mm)是一个重要的参数。破坏机制为地下烧坏和高场诱导金属桥接从栅到源或漏。数值模拟表明栅极处有高电流密度瞬态,源极和漏极处有热电子热瞬态。高功率脉冲在栅极边缘附近以及源极和漏极区域产生热电子。研究表明,这些因素导致了栅极处反冲增强的互扩散和热诱导的金属-砷化镓互扩散,主要是在源极和漏极。如果这种降解进展到细丝金属-砷化镓相互扩散到达衬底/有源通道界面的点,则由热失控引发地下烧毁。
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