Yongjoo Kwon, Yoonsun Choi, Kyuhwan Choi, Y. Kim, Seungyul Choi, Junghoon Lee, Jung-mok Bae
{"title":"Development of micro variable optics array","authors":"Yongjoo Kwon, Yoonsun Choi, Kyuhwan Choi, Y. Kim, Seungyul Choi, Junghoon Lee, Jung-mok Bae","doi":"10.1109/MEMSYS.2014.6765576","DOIUrl":null,"url":null,"abstract":"This research is on the development of a micro variable optics array which employs electrowetting as the working principle. The single pixel of the array has four separated electrodes and each of them is controlled independently giving the device multi-degree of freedom. The separated electrodes are fabricated using a thick photoresist and electroplating. Several formulas showing the relation among the radius of curvature, the prism angle, and electrowetting parameters are provided. The prism angles are measured to be ±30° and compared to the calculated values. The measurement of the radius of curvature is also presented showing that the various radiuses of curvature are achievable from concave to convex.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"143 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2014.6765576","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This research is on the development of a micro variable optics array which employs electrowetting as the working principle. The single pixel of the array has four separated electrodes and each of them is controlled independently giving the device multi-degree of freedom. The separated electrodes are fabricated using a thick photoresist and electroplating. Several formulas showing the relation among the radius of curvature, the prism angle, and electrowetting parameters are provided. The prism angles are measured to be ±30° and compared to the calculated values. The measurement of the radius of curvature is also presented showing that the various radiuses of curvature are achievable from concave to convex.