Getters: micromolecular scavengers for packaging [MEMS]

Abstract

MEMS has become a very high profile technology during the past year, but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work must be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging.