Micro and Nano Characterization Facility: Operations Methodology and Technical Management

V. Mishra, S. Raghavan, N. Bhat, R. Pratap
{"title":"Micro and Nano Characterization Facility: Operations Methodology and Technical Management","authors":"V. Mishra, S. Raghavan, N. Bhat, R. Pratap","doi":"10.1109/UGIM.2012.6247094","DOIUrl":null,"url":null,"abstract":"Summary form only given. The Micro and Nano Characterization Facility (MNCF) located in Centre for Nano Science and Engineering (CeNSE) building on the Indian Institute of Science (IISc, Bangalore, INDIA) campus is a centralized facility for characterization of Micro and Nano Devices. The National Nanofabrication Centre (NNFC) which is 10,000 sq. ft. of clean room housing state of the art equipment for nanofabrication is located in the same building. The MNCF is 5000 sq. ft precision controlled environment facility housing 4 distinct laboratories for Electrical, Mechanical, Optical and Material Characterization. The MNCF is a national facility with plethora of high end equipment spanning over multiple disciplines of nano science and engineering rarely found under a single roof. The prime funding agencies to establish this facility are NPMAS-DRDO and MCIT. MNCF is a fully-staffed, user research facility at IISc that offers researchers convenient and reasonably priced access to a wide- range of state-of-the-art analytical instrumentation and services. The Mission of this facility is to support research and educational objectives of CeNSE, IISc and offer state of the art characterization facilities and services to nanoscience academia (thorugh INUP), related industries and National Laboratories. The CeNSE witnesses multidesciplinary research activities in nano-scale electronics, nano technologies, smart materials, micro and nanoelectromechanical systems (NEMS, MEMS), bio-electronic interfaces and integrated small-scale systems. Various characterization techniques available in MNCF are RF Characterization, AC/DC Characterization, AC/DC Characterization at different temperatures in electrical characterization lab. Mechanical characterization of MNCF is equipped with techniques like laser dopplar vibrometry, Stroboscopic Video Microscopy, White Light Interferometry, Non-destructive acoustic Investigations, Atomic Force Microscopy, Tensile and compressive strength measurements. Material Characterization Lab houses SEM, FIB, Nano particle analysis techniques and optical characterization lab facilitates STM, PL, RAMAN Spectroscopy, Solar Cell Characterization and quantum efficiency measurements. XPS and XRD facilities are scheduled for commissioning soon. This paper discusses various challenges involved in establishing the infrastructure of the facility, financial and technical operations, staffing, access control and maintenance of user discipline during its' 24/7 operations.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2012.6247094","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Summary form only given. The Micro and Nano Characterization Facility (MNCF) located in Centre for Nano Science and Engineering (CeNSE) building on the Indian Institute of Science (IISc, Bangalore, INDIA) campus is a centralized facility for characterization of Micro and Nano Devices. The National Nanofabrication Centre (NNFC) which is 10,000 sq. ft. of clean room housing state of the art equipment for nanofabrication is located in the same building. The MNCF is 5000 sq. ft precision controlled environment facility housing 4 distinct laboratories for Electrical, Mechanical, Optical and Material Characterization. The MNCF is a national facility with plethora of high end equipment spanning over multiple disciplines of nano science and engineering rarely found under a single roof. The prime funding agencies to establish this facility are NPMAS-DRDO and MCIT. MNCF is a fully-staffed, user research facility at IISc that offers researchers convenient and reasonably priced access to a wide- range of state-of-the-art analytical instrumentation and services. The Mission of this facility is to support research and educational objectives of CeNSE, IISc and offer state of the art characterization facilities and services to nanoscience academia (thorugh INUP), related industries and National Laboratories. The CeNSE witnesses multidesciplinary research activities in nano-scale electronics, nano technologies, smart materials, micro and nanoelectromechanical systems (NEMS, MEMS), bio-electronic interfaces and integrated small-scale systems. Various characterization techniques available in MNCF are RF Characterization, AC/DC Characterization, AC/DC Characterization at different temperatures in electrical characterization lab. Mechanical characterization of MNCF is equipped with techniques like laser dopplar vibrometry, Stroboscopic Video Microscopy, White Light Interferometry, Non-destructive acoustic Investigations, Atomic Force Microscopy, Tensile and compressive strength measurements. Material Characterization Lab houses SEM, FIB, Nano particle analysis techniques and optical characterization lab facilitates STM, PL, RAMAN Spectroscopy, Solar Cell Characterization and quantum efficiency measurements. XPS and XRD facilities are scheduled for commissioning soon. This paper discusses various challenges involved in establishing the infrastructure of the facility, financial and technical operations, staffing, access control and maintenance of user discipline during its' 24/7 operations.
微纳米表征设备:操作方法和技术管理
只提供摘要形式。位于印度科学研究所(IISc, Bangalore, INDIA)校园内的纳米科学与工程中心(CeNSE)的微纳米表征设施(MNCF)是一个用于表征微纳米器件的集中设施。国家纳米制造中心(NNFC)占地10000平方英尺。1英尺的洁净室容纳了最先进的纳米制造设备,位于同一栋楼。MNCF有5000平方英尺。ft精密控制环境设施,拥有4个不同的实验室,用于电气,机械,光学和材料表征。MNCF是一个国家设施,拥有过多的高端设备,跨越纳米科学和工程的多个学科,很少在一个屋檐下发现。建立该设施的主要资助机构是NPMAS-DRDO和MCIT。MNCF是IISc的一个配备齐全的用户研究设施,为研究人员提供方便和合理价格的最先进的分析仪器和服务。该设施的使命是支持CeNSE、IISc的研究和教育目标,并为纳米科学学术界(通过INUP)、相关行业和国家实验室提供最先进的表征设施和服务。CeNSE见证了纳米电子学,纳米技术,智能材料,微纳米机电系统(NEMS, MEMS),生物电子接口和集成小规模系统的多学科研究活动。MNCF提供的各种表征技术有射频表征、交流/直流表征、电表征实验室不同温度下的交流/直流表征。MNCF的力学表征配备了激光多普勒振动测量、频闪视频显微镜、白光干涉测量、无损声学研究、原子力显微镜、拉伸和抗压强度测量等技术。材料表征实验室拥有SEM, FIB,纳米颗粒分析技术和光学表征实验室,促进STM, PL,拉曼光谱,太阳能电池表征和量子效率测量。XPS和XRD设备计划很快投入使用。本文讨论了在24/7运行期间建立设施基础设施、财务和技术操作、人员配置、访问控制和维护用户纪律所涉及的各种挑战。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信