In situ calibration of lightpipe radiometers for rapid thermal processing between 300/spl deg/C to 700/spl deg/C

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. Pub Date : 1900-01-01 DOI:10.1109/RTP.2004.1441956

W. Kimes, K. Kreider, D. Ripple, B. Tsai

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引用次数: 3

Abstract

Many rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiometers (LPRTs), which have been limited to measuring temperatures above 500degC because of the low signal level below 500degC. New commercial LPRTs couple the optical detector directly to the lightpipe, eliminating the signal loss from optical cables. These cable-less light pipe radiometers (CLRTs) are capable of measuring temperature below 300degC. We present the results of calibrating a CLRT against our NIST thin-film thermocouple (TFTC) calibration wafer from 315degC to 700degC in our NIST RTP test bed. Below 550degC, light leakage from the heating lamps of the RTP tool introduced a significant error in the LPRT readings. By measuring the transient response of the CLRTs following rapid energizing of the heating lamps, we were able to differentiate between the radiance of the wafer and ambient chamber light. This allowed us to subtract the ambient chamber light from total measured radiation

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在300/spl度/C至700/spl度/C之间进行快速热处理的光管辐射计的现场校准

目前，许多快速热处理(RTP)工具都是通过光管辐射计(lprt)进行监测和控制的，由于低于500摄氏度的信号水平低，lprt只能测量500摄氏度以上的温度。新的商用lprt将光探测器直接耦合到光管上，消除了光缆的信号损失。这些无电缆光管辐射计(clrt)能够测量300摄氏度以下的温度。我们展示了在我们的NIST RTP测试台上，根据我们的NIST薄膜热电偶(TFTC)校准晶圆从315°c到700°c校准CLRT的结果。当温度低于550℃时，RTP工具的加热灯漏光导致LPRT读数出现明显误差。通过测量加热灯快速通电后clrt的瞬态响应，我们能够区分晶圆片和环境室光的辐射。这使我们能够从测量的总辐射中减去环境室的光

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12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004.

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