K. Lim, M. A. Hamid, R. Shamsudin, A. Jalar, N. Al-Hardan
{"title":"Structural, morphological and photoluminescence studies of SnO2 microparticles","authors":"K. Lim, M. A. Hamid, R. Shamsudin, A. Jalar, N. Al-Hardan","doi":"10.1109/SMELEC.2012.6417247","DOIUrl":null,"url":null,"abstract":"Tin dioxide (SnO2) microparticles have been grown on p-type Si (100) substrate by thermal evaporation method. The experiment was conducted at 1080oC, under 1.6% oxygen (O2) gas in atmospheric ambient. The prepared film were characterized using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) equipped with energy dispersive X-ray spectroscopy (EDX) and photoluminescence (PL) measurement. The growth particles were crystalline with size ranging from 100 nm to 500 nm. The PL spectrum of the SnO2 microparticles exhibits a broad visible light emission with a peak centered at around 611 nm.","PeriodicalId":210558,"journal":{"name":"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2012.6417247","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Tin dioxide (SnO2) microparticles have been grown on p-type Si (100) substrate by thermal evaporation method. The experiment was conducted at 1080oC, under 1.6% oxygen (O2) gas in atmospheric ambient. The prepared film were characterized using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) equipped with energy dispersive X-ray spectroscopy (EDX) and photoluminescence (PL) measurement. The growth particles were crystalline with size ranging from 100 nm to 500 nm. The PL spectrum of the SnO2 microparticles exhibits a broad visible light emission with a peak centered at around 611 nm.