Process variations and their impact on circuit operation

Abstract

The statistical variations in electrical parameters, such as transistor gain factors and interconnect resistances, due to variations in the manufacturing process are studied using data obtained from a 0.8 /spl mu/m CMOS process. The impact of these variations and correlations on circuit operation is illustrated. Examples show that circuit delay can increase from the mean by about 100% due to crosstalk effects aggravated by process variations. Case studies emphasize the need for a tighter coupling between fabrication and circuit design and the need for new design corners based on process information.