Assessment of thermo-mechanical stresses in Low Temperature Joining Technology

T. Herboth, C. Fruh, M. Gunther, J. Wilde
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引用次数: 27

Abstract

The Low Temperature Joining Technology (LTJT) creates silver joints by a sintering process. It is an alternative die-attach technology to soldering. To initiate the sintering process the temperature has to be raised above ~ 215°C. The quality of a sintered joint is strongly enhanced by applying pressure to the specimen during the process, thus reducing the porosity in the sintered material. After the interconnect process, residual stresses occur in the sintered material, as well as in the joined parts. The examined specimen was a silicon MOSFET attached to a copper substrate at a sintering pressure of 50 MPa. The scope of this paper is to provide information about residual stress after production and thermo-mechanical stresses during thermal cycling. The focus is put on the investigation of the reliability of sintered silver by simulation.
低温连接工艺中热机械应力的评估
低温连接技术(LTJT)通过烧结过程产生银接头。这是焊接的另一种模接技术。要开始烧结过程,温度必须提高到~ 215℃以上。通过在烧结过程中对试样施加压力,烧结接头的质量得到了极大的提高,从而减少了烧结材料中的孔隙率。在互连过程之后,在烧结材料中以及在连接部件中都会产生残余应力。所测试的样品是一个硅MOSFET附着在铜衬底上,烧结压力为50 MPa。本文的范围是提供有关生产后的残余应力和热循环过程中的热机械应力的信息。重点对烧结银的可靠性进行了仿真研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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