Stress control for process optimization of the capacitive pressure sensors for biomedical applications achieved by surface micromachining technology

F. Găiseanu, C. Postolache, D. Dascalu, J. Esteve, D. Tsoukalas, R. Jachowicz, A. Badoiu, E. Vasile
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引用次数: 1

Abstract

An integrated structure of capacitive pressure sensor for biomedical applications achieved by surface micromachining technology, consisting in the pressure sensor and a testing component is presented. The test structure permitted to apply the pull-in voltage method for the evaluation of the residual stress in the polysilicon layer on the basis of a new form of the set of two equations describing the beam pull-in voltage effect. The integrated structure allowed the optimization of the phosphorus diffusion process to obtain low stress polysilicon membranes of the capacitive pressure sensors for biomedical applications.
利用表面微加工技术实现生物医学用电容式压力传感器工艺优化的应力控制
提出了一种利用表面微加工技术实现的生物医学用电容式压力传感器的集成结构,包括压力传感器和测试元件。该测试结构允许在描述光束拉入电压效应的两个方程集的新形式的基础上,应用拉入电压方法来评估多晶硅层中的残余应力。集成结构允许优化磷扩散过程,以获得用于生物医学应用的电容式压力传感器的低应力多晶硅膜。
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