{"title":"Improvement of thermoelectric TiZrNiSn thin films by contact layers","authors":"W. Wunderlich, Y. Matsumura","doi":"10.1109/LTB-3D.2014.6886168","DOIUrl":null,"url":null,"abstract":"The Half-Heusler alloy (Ti,Zr)NiSn has been reported [1-6] as one of the thermoelectric (TE) materials with large Seebeck coefficient. Thin films sputtered by magnetron-sputtering have better properties when they are deposited on Cu, rather than Fe, Ni or Si. This interface phenomenon is explained by band-structure calculations and guidelines for 3D-printer processing are provided.","PeriodicalId":123514,"journal":{"name":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LTB-3D.2014.6886168","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The Half-Heusler alloy (Ti,Zr)NiSn has been reported [1-6] as one of the thermoelectric (TE) materials with large Seebeck coefficient. Thin films sputtered by magnetron-sputtering have better properties when they are deposited on Cu, rather than Fe, Ni or Si. This interface phenomenon is explained by band-structure calculations and guidelines for 3D-printer processing are provided.