Thermal management with additive multilayer circuitry on metal substrates

G. Matijasevic, P. Gandhi, C. Gallagher, Xiao-chun Xi, L. Ha
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引用次数: 1

Abstract

High density microelectronic circuit substrates have been fabricated by additive processing on metal substrates. The circuit traces and vias are fabricated using an electrically conductive paste and permanent photoimageable dielectric materials developed for microvia technologies. The conductive material is a metal-polymer composite based on transient liquid phase sintering (TLPS) technology. Bulk thermal conductivity measurements of the TLPS conductive composites show that they have similar thermal conductivity to solder. The low processing temperature (<250/spl deg/C) allows their use on Al substrates. The key attribute of the technology is its fine line multilayer circuit capability on metal substrates. To show the advantages of the additive metal substrate technology over conventional approaches, thermal dissipation has been measured by temperature mapping using emissivity compensated IR imaging. A serpentine pattern was fabricated on a variety of substrates, including Cu-clad FR-4 and Al. Thermal imaging shows the much higher power dissipating capabilities of the Al substrate. A prototype thermal test board was also fabricated and assembled with power components. The thermal dissipation of the power components was measured to be up to 75% more efficient than the baseline, a printed circuit board with thermal vias and a heat sink. The multilayer circuit technology described here was also used to fabricate a large area heat sensor which has 1600 thermocouples per square centimeter and a sensitivity of 40 mV/(W/cm/sup 2/).
金属基板上加性多层电路的热管理
在金属衬底上采用增材加工技术制备了高密度微电子电路衬底。电路走线和过孔是使用为微通孔技术开发的导电浆料和永久光成像介电材料制造的。该导电材料是基于瞬态液相烧结(TLPS)技术的金属-聚合物复合材料。TLPS导电复合材料的体热导率测量表明,它们具有与焊料相似的热导率。低加工温度(<250/spl℃)允许它们在Al基板上使用。该技术的关键属性是其在金属基板上的细线多层电路性能。为了显示增材金属衬底技术相对于传统方法的优势,通过使用发射率补偿红外成像的温度映射来测量散热。在多种衬底上制作了蛇形图案,包括cu包覆的FR-4和Al。热成像显示Al衬底具有更高的功耗能力。还制作了热测试板原型,并与电源组件进行了组装。经测量,功率元件的散热效率比基线高75%,采用带有热通孔和散热器的印刷电路板。本文描述的多层电路技术还用于制造大面积热传感器,该传感器每平方厘米具有1600个热电偶,灵敏度为40 mV/(W/cm/sup 2/)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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