HB1340 ℄ Advanced 0.13um BCDMOS technology of complimentary LDMOS including fully isolated transistors

Abstract

In this work, we developed a HB1340-0.13um BCD technology of the complimentary LDMOS including fully isolated structure device with dual drift layer. We could achieve LDMOS with best-in-class trade-off between specific on-resistance and breakdown voltage by its optimized drain engineering. The HB1340 process in 0.13um 1.5V/5V/6V CMOS technology platform can provide various kinds of high voltage devices such as LDMOS, DEMOS from 12V to 40V and fully isolated 24V LDNMOS for mobile and display power application. High gain BJT, Zener diode, high voltage diode, high resistor, MIM and EEPROM are also have been integrated in smart power technology.