Analysis of a MEMS piezoelectric microgenerator using network placement method

Abstract

This paper presents a new approach for analyzing a MEMS piezoelectric microgenerator based on the network placement method. First, new piezoelectric model is proposed by modifying the device model using its equivalent closed loop transfer function. The network placement method is then used to vary the microgenerator poles and zeros thus altering the generated voltage and power. The new model can be used to calculate the load that produces certain transient parameters. The model is simulated by applying a pulse force of 1 N amplitude and 1.2 ms width. A considerable improvement on the average voltage and apparent power curves is recorded by placing a Wein Bridge passive network having R = 278.2 MΩ and C = 1 nF. The optimum voltage and power are 3.8 V and 8.8 μVA, respectively.