A low-temperature temporary lamination and laser debonding technology to enable cost-effective fabrication of a through-glass-via (TGV) interposer on a panel substrate

Abstract

This paper describes a handling process for a thin glass panel, 200 mm × 200 mm × 130 (im, through double-side redistribution layer (RDL) formation to enable cost-effective fabrication of through-glass-via (TGV) interposers. The integration scheme includes lamination of a low-temperature bonding material utilizing a lamination process temperature of less than 100°C to bond a thin (130-μm) glass panel onto a carrier glass panel 700 μm thick. The carrier glass panel is treated with a 150-nm laser release layer prior to lamination of the bonding film and subsequently the thin glass panel. Next, the RDL is formed, and the front side of the thin glass panel undergoes aluminum physical vapor deposition (PVD) and polymeric dielectric material deposition. Then a second carrier glass panel, treated with the laser release material and laminated with bonding film, is bonded on the front side of the thin glass panel. An excimer laser with an x-y scanning stage is rastered across the first carrier to ablate the laser release layer for separation of first carrier. Following laser separation, a solvent cleaning step is performed to remove bonding material from the backside of the thin glass panel. The process of applying metal PVD, lithography, and dielectric material is repeated on the backside of the thin glass panel. Finally, the thin glass panel is mounted to tape, and the second carrier glass panel is released using laser ablation to reveal the front side of the thin glass for solvent cleaning and final inspection. The integration of the dry bonding film, thin glass panel lamination, and selective laser debonding technology in this study will pave the way for realization of panel-level packaging in the near future.